KrF Resist

TOK KrF Photoresist Solutions

TOK manufactures KrF photoresist materials for applications with film thickness from 0.3um to 3um for the 248nm wavelength. We manufacture both positive and negative photo resists in our KrF product lineup. TOK KrF photoresists are manufactured in our facilities in Japan. If you have a project and are searching for an KrF photoresist solution, please contact us and we can provide more specific data about our product lineup.

KrF Resist Roadmap